Enhancement of polymerization in CH sub(3)SiO sub(3/2) coating film by gaseous amines

Coating films of CH sub(3)SiO sub(3/2) on sapphire, SiO sub(2) glass, and metallic substrates have been prepared from an aluminum acetylacetonate catalyzed oligomer solution. The coating films are treated in atmospheres of gaseous amines. The reaction is monitored by using an infrared absorption of...

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Veröffentlicht in:Thin solid films 1999-01, Vol.349 (1), p.24-28
Hauptverfasser: Zhang, Zuyi, Wakabayashi, Hajimu, Tanigami, Yoshinori, Terai, Ryohei
Format: Artikel
Sprache:eng
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Zusammenfassung:Coating films of CH sub(3)SiO sub(3/2) on sapphire, SiO sub(2) glass, and metallic substrates have been prepared from an aluminum acetylacetonate catalyzed oligomer solution. The coating films are treated in atmospheres of gaseous amines. The reaction is monitored by using an infrared absorption of Si-OH at 3000-3700 cm super(-1). The polymerization of silanols in the coating films proceeds at an elevated treatment temperature. The degree of polymerization becomes larger with the exposure to amines, indicative of a catalytic effect of gaseous amines on the polymerization.
ISSN:0040-6090