Effect of film composition on the orientation of (Ba,Sr)TiO3 grains in (Ba,Sr)(y)TiO(2+y) thin films

Thin films of composition (Ba,Sr)(y)TiO(2+y), with y in the range 0.43-1.64, were deposited by MOCVD on (100) MgO substrates at various growth conditions. XRD and TEM studies showed that the films were composed of epitaxial Ba(1-x)Sr(x)TiO3 (x approximately equal to 0.06) grains and an amorphous pha...

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Veröffentlicht in:Journal of materials research 1999-12, Vol.14 (12), p.4657-4666
Hauptverfasser: Kaiser, Debra L, Vaudin, Mark D, Rotter, Lawrence D, Bonevich, John E, Levin, Igor, Armstrong, John T, Roytburd, Alexander L, Schlom, Darrell G
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Sprache:eng
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Zusammenfassung:Thin films of composition (Ba,Sr)(y)TiO(2+y), with y in the range 0.43-1.64, were deposited by MOCVD on (100) MgO substrates at various growth conditions. XRD and TEM studies showed that the films were composed of epitaxial Ba(1-x)Sr(x)TiO3 (x approximately equal to 0.06) grains and an amorphous phase. The orientation of the tetragonal Ba(1-x),Sr(x)TiO3 grains (pure a axis, pure c axis, or a mix of the two) was found to be strongly dependent upon film composition. This composition dependence is explained for the majority of the Ti-rich films by an analysis of average strains in the two-phase films, assuming a compressive strain of approximately equal to 1 percent in the amorphous phase. (Author)
ISSN:0884-2914