Scanning thermal microscopy studies of local temperature distribution of micron-sized metallization lines

The scanning thermal microscope (SThM) was used to measure the surface temperature distribution and surface morphology of micron-sized Al–Si–Cu metallization lines which was in situ electrically heated for SThM dynamical measurements. The local temperature along micron-sized lines was detected by a...

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Veröffentlicht in:	Microelectronics and reliability 2001-08, Vol.41 (8), p.1255-1258
Hauptverfasser:	Ji, Yuan, Li, Ziguo, Wang, Dong, Cheng, Yaohai, Luo, Dong, Zong, Bin
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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