A small-signal RF model and its parameter extraction for substrate effects in RF MOSFETs

We propose a physically acceptable small-signal model incorporating substrate effects, in order to eliminate the severe frequency-dependence of the intrinsic drain-source resistance observed from a conventional model of RF Si MOSFETs. This model is based on the substrate network where a parallel RC circuit is connected in series with the drain junction capacitance. It is demonstrated that the substrate effects result in the frequency-dispersion of the effective drain-source resistance and capacitance below 10 GHz. An accurate extraction technique using a simple curve-fit approach is developed to determine substrate parameters directly, and their bulk voltage-dependencies are presented in detail. The validity of this model is partially proved by finding intrinsic parameters exhibiting frequency-independence up to 10 GHz. Better agreement with measured S-parameters is achieved by using the new substrate model rather than the conventional one, verifying the accuracy of the physical model and extraction technique.