Design and analysis of a microgyroscope with sol-gel piezoelectric plate

A piezoelectric-plate vibration microgyroscope is proposed in this paper. Unlike other piezoelectric gyroscopes, it is based on a piezoelectric plate without the use of any elastic element. Its structure is very simple. The piezoelectric plate is excited in the polarization direction to produce the thickness extension vibration mode. If there is an input rotation on the vibrator, an induced voltage will be produced in the direction perpendicular to the plane composed of the polarization axis and the input angular rate axis according to the Coriolis effect. This arrangement allows for sensing of two-axis rotation on a single chip. A mathematical model for the microgyroscope is presented, and calculated results for a given module are provided. A macromode experiment has been carried out, and experimental results correspond very well to theoretical predictions.