Deposition of diamond-like films upon laser irradiation of the interface of a transparent substrate with liquid aromatic hydrocarbons

Amorphous diamond films are deposited on transparent substrates upon exposure of its interface with liquid hydrocarbons (C sub(6)H sub(5)CH sub(3), C sub(6)H sub(6), and C sub(6)H sub(5)CH(CH sub(3)) sub(2)) to pulsed visible radiation of a Cu vapor laser ( lambda identical with 510.6 nm). The X-ray...

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Veröffentlicht in:Thin solid films 1999-12, Vol.357 (2), p.144-150
Hauptverfasser: Lyalin, A.A., Simakin, A.V., Loubnin, E.N., Shafeev, G.A.
Format: Artikel
Sprache:eng
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Zusammenfassung:Amorphous diamond films are deposited on transparent substrates upon exposure of its interface with liquid hydrocarbons (C sub(6)H sub(5)CH sub(3), C sub(6)H sub(6), and C sub(6)H sub(5)CH(CH sub(3)) sub(2)) to pulsed visible radiation of a Cu vapor laser ( lambda identical with 510.6 nm). The X-ray Auger electron spectroscopy (XAES), reflection high energy electron diffraction (RHEED), scanning electron microscopy (SEM), profilometry, optical spectroscopy, and Raman analysis at lambda identical with 632.8 nm excitation wavelength are employed to characterize the deposited films. The sp super(3) fraction in deposited films amounts to 60-70% and depends on the precursor. The films show excellent adherence, are transparent in the visible and have microhardness of 50-70 GPa, as measured with a nanoindentor. The sp super(3) bond fraction in deposited films increases with addition to the liquid hydrocarbon a suspension of diamond nanoparticles.
ISSN:0040-6090
DOI:10.1016/S0040-6090(99)00407-1