A temperature-controlled smart surface-acoustic-wave gas sensor

This paper deals with the thermal and temperature-control aspects of a gas sensor based on surface-acoustic-wave (SAW) devices in a dual delay-line configuration. Application of smart temperature sensors combined with a micro-controller in a temperature-control system provides for a high-performance...

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Veröffentlicht in:	Sensors and actuators. A, Physical Physical, 1998-11, Vol.71 (1), p.27-34
Hauptverfasser:	van der Meer, Paul R., Meijer, Gerard C.M., Vellekoop, Michiel J., Kerkvliet, Harry M.M., van den Boom, Ton J.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Applied sciences Dielectric, ferroelectric, and piezoelectric devices Electronics Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics SAW devices Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Smart sensors Temperature control Thermal instruments, apparatus and techniques Thermometry
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Beschreibung
Zusammenfassung:	This paper deals with the thermal and temperature-control aspects of a gas sensor based on surface-acoustic-wave (SAW) devices in a dual delay-line configuration. Application of smart temperature sensors combined with a micro-controller in a temperature-control system provides for a high-performance low-cost A/D conversion. An anti-windup control mechanism has been implemented to solve the problem of actuator saturation.
ISSN:	0924-4247 1873-3069
DOI:	10.1016/S0924-4247(98)00166-6