A Level Set Method for Thin Film Epitaxial Growth
We present a level set based numerical algorithm for simulating a model of epitaxial growth. The island dynamics model is a continuum model for the growth of thin films. In this paper, we emphasize the details of the numerical method used to simulate the island dynamics model.
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Veröffentlicht in: | Journal of computational physics 2001-03, Vol.167 (2), p.475-500 |
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Hauptverfasser: | , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | We present a level set based numerical algorithm for simulating a model of epitaxial growth. The island dynamics model is a continuum model for the growth of thin films. In this paper, we emphasize the details of the numerical method used to simulate the island dynamics model. |
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ISSN: | 0021-9991 1090-2716 |
DOI: | 10.1006/jcph.2000.6689 |