High coercivity ferrite thin-film tape media for perpendicular recording

Reactive sputtering using an electron–cyclotron-resonance microwave plasma was introduced to prepare ferrite thin-film media at substrate temperatures lower than 150°C without oxidation process after their deposition. The ferrite thin-films deposited on glass substrates had perpendicular magnetic an...

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Veröffentlicht in:Journal of magnetism and magnetic materials 2001-10, Vol.235 (1), p.342-346
Hauptverfasser: Yamamoto, Setsuo, Hirata, Kei, Kurisu, Hiroki, Matsuura, Mitsuru, Doi, Takanori, Tamari, Kousaku
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Sprache:eng
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Zusammenfassung:Reactive sputtering using an electron–cyclotron-resonance microwave plasma was introduced to prepare ferrite thin-film media at substrate temperatures lower than 150°C without oxidation process after their deposition. The ferrite thin-films deposited on glass substrates had perpendicular magnetic anisotropy, high coercivity of about 3000 Oe and very smooth surface. The ferrite thin-films deposited on organic flexible film substrates such as polyimide and PET films also showed perpendicular magnetic anisotropy and high coercivity of 1700–2000 Oe.
ISSN:0304-8853
DOI:10.1016/S0304-8853(01)00372-9