Silicon microchambers for DNA amplification

Microchambers have been fabricated in silicon by bulk micromachining using anisotropic wet etching. Rapid temperature cycling and control at low power is achieved using a special thermal design of the chambers, combined with thin film platinum resistors as temperature sensors and heaters. The chambe...

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Veröffentlicht in:	Sensors and actuators. A, Physical Physical, 1998-11, Vol.71 (1), p.81-88
Hauptverfasser:	Daniel, J.H., Iqbal, S., Millington, R.B., Moore, D.F., Lowe, C.R., Leslie, D.L., Lee, M.A., Pearce, M.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Bioanalysis DNA Enzymes Etching Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Microchambers Micromechanical devices and systems Physics Polymerase chain reaction Silicon micromachining Silicon wafers Thermal cycling Thermal instruments, apparatus and techniques Thermal isolation Thermometry
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Beschreibung
Zusammenfassung:	Microchambers have been fabricated in silicon by bulk micromachining using anisotropic wet etching. Rapid temperature cycling and control at low power is achieved using a special thermal design of the chambers, combined with thin film platinum resistors as temperature sensors and heaters. The chambers have been used for the polymerase chain reaction (PCR) in order to amplify DNA. Rapid temperature cycling and small size are promising attributes for portable high efficiency analytical systems.
ISSN:	0924-4247 1873-3069
DOI:	10.1016/S0924-4247(98)00158-7