Gold and platinum as ozone sensitive layer in work-function gas sensors

Gold and platinum as ozone sensitive layer in work-function gas sensors

Hybrid suspended gate FET (HSGFET) devices with a sensitive layer of platinum or gold were proven to be well-suited as reproducible ozone detection from the low ppb region up to 500 ppb and higher. Operating at 130°C, gold shows a nearly linear dependence on ozone concentration with high signals and...

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2001-12, Vol.80 (3), p.174-178
Hauptverfasser: Zimmer, M., Burgmair, M., Scharnagl, K., Karthigeyan, A., Doll, T., Eisele, I.
Format: Artikel
Sprache:eng
Schlagworte:
Gas sensor
Gold
Ozone detection
Platinum
Sensitive layer
Work-function
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Beschreibung
Zusammenfassung:Hybrid suspended gate FET (HSGFET) devices with a sensitive layer of platinum or gold were proven to be well-suited as reproducible ozone detection from the low ppb region up to 500 ppb and higher. Operating at 130°C, gold shows a nearly linear dependence on ozone concentration with high signals and a small humidity influence. Platinum at 130°C convinces with a fast response time and low cross sensitivities to other gases.
ISSN:0925-4005
1873-3077
DOI:10.1016/S0924-4247(01)00673-2