Role of Boundary Conditions in Monte Carlo Simulation of Microelectromechanical Systems

New boundary conditions for the direct simulation Monte Carlo (DSMC) method are proposed which are suitable for low-speed MEMS applications. These conditions allow for the proper directions of signal propagation in subsonic flow and for the specification of inlet and exit pressure. Low-speed microch...

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Veröffentlicht in:	Journal of thermophysics and heat transfer 1998-07, Vol.12 (3), p.447-449
Hauptverfasser:	Nance, Robert P, Hash, David B, Hassan, H. A
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Boundary conditions Computer simulation Exact sciences and technology Fluid dynamics Fundamental areas of phenomenology (including applications) General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Microelectromechanical systems Monte Carlo methods Physics Rarefied gas dynamics Servo and control equipment robots
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Beschreibung
Zusammenfassung:	New boundary conditions for the direct simulation Monte Carlo (DSMC) method are proposed which are suitable for low-speed MEMS applications. These conditions allow for the proper directions of signal propagation in subsonic flow and for the specification of inlet and exit pressure. Low-speed microchannel computations using the new conditions yield much better results than those obtained with the traditional DSMC boundary conditions. (AIAA)
ISSN:	0887-8722 1533-6808
DOI:	10.2514/2.6358