Optical studies of carbon nitride thin films deposited by reactive pulsed laser ablation of a graphite target in low pressure ammonia
We report the characteristics revealed through optical investigations (microscopic studies, optical and IR transmission) of the thin films deposited by multipulse UV reactive laser ablation of a graphite target in 10 2 Pa ammonia. We observe that the films deposited at room temperature contain a mix...
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Veröffentlicht in: | Thin solid films 1998-06, Vol.323 (1), p.72-78 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We report the characteristics revealed through optical investigations (microscopic studies, optical and IR transmission) of the thin films deposited by multipulse UV reactive laser ablation of a graphite target in 10
2 Pa ammonia. We observe that the films deposited at room temperature contain a mixture of carbon bonded to nitrogen in various configurations including the triple one and have a large optical band gap. On the other hand, the films deposited at 320°C have a lower content in nitrogen. We present evidence of C–N bonds with lower charge transfer. The layers are non-uniform and have a significantly narrower optical band gap. We consider that this difference is due to the desorption by heating of the highly reactive CN and CNH radicals. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/S0040-6090(97)01050-X |