Optical studies of carbon nitride thin films deposited by reactive pulsed laser ablation of a graphite target in low pressure ammonia

We report the characteristics revealed through optical investigations (microscopic studies, optical and IR transmission) of the thin films deposited by multipulse UV reactive laser ablation of a graphite target in 10 2 Pa ammonia. We observe that the films deposited at room temperature contain a mix...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Thin solid films 1998-06, Vol.323 (1), p.72-78
Hauptverfasser: Mihailescu, I.N, Gyorgy, E, Alexandrescu, R, Luches, A, Perrone, A, Ghica, C, Werckmann, J, Cojocaru, I, Chumash, V
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:We report the characteristics revealed through optical investigations (microscopic studies, optical and IR transmission) of the thin films deposited by multipulse UV reactive laser ablation of a graphite target in 10 2 Pa ammonia. We observe that the films deposited at room temperature contain a mixture of carbon bonded to nitrogen in various configurations including the triple one and have a large optical band gap. On the other hand, the films deposited at 320°C have a lower content in nitrogen. We present evidence of C–N bonds with lower charge transfer. The layers are non-uniform and have a significantly narrower optical band gap. We consider that this difference is due to the desorption by heating of the highly reactive CN and CNH radicals.
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(97)01050-X