Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry

The thickness of thin films of non-functional silane bis-1,2-(triethoxysilyl)ethane (H 5C 2O) 3Si-CH 2CH 2-Si(OC 2H 5) 3 (BTSE) deposited on aluminium surfaces is investigated using spectroscopic ellipsometry (250–1700 nm). The data processing of the ellipsometry spectra is carried out by means of s...

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Veröffentlicht in:	Thin solid films 2001-03, Vol.384 (1), p.37-45
Hauptverfasser:	Franquet, A., De Laet, J., Schram, T., Terryn, H., Subramanian, V., van Ooij, W.J., Vereecken, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminium Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Silane Spectroscopic ellipsometry Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thickness Thin film structure and morphology
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Zusammenfassung:	The thickness of thin films of non-functional silane bis-1,2-(triethoxysilyl)ethane (H 5C 2O) 3Si-CH 2CH 2-Si(OC 2H 5) 3 (BTSE) deposited on aluminium surfaces is investigated using spectroscopic ellipsometry (250–1700 nm). The data processing of the ellipsometry spectra is carried out by means of simulation and regression techniques. New advances in data processing, e.g. multiple sample analysis and determination of thickness non-uniformity, are applied to characterise these thin polymer films realistically. The influence of the concentration of the BTSE solution and the curing of the film is investigated. Optical thickness estimates are corroborated by independent auger electron spectroscopy and transmission electron microscopy analysis.
ISSN:	0040-6090 1879-2731
DOI:	10.1016/S0040-6090(00)01805-8