Carbon masks for patterning of YBa sub(2)Cu sub(3)O sub(x) submicron Josephson junctions

Carbon masks for patterning of YBa sub(2)Cu sub(3)O sub(x) submicron Josephson junctions

We have developed a fabrication process for submicron wide YBa sub(2)Cu sub(3)O sub(x) (YBCO) Josephson junctions on bicrystal substrates. The masks patterned in carbon films grown by laser ablation were used for ion beam etching of YBCO films. The carbon deposition parameters providing conservation...

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Veröffentlicht in:IEEE transactions on applied superconductivity 2001-03, Vol.11 (1 I), p.292-295
Hauptverfasser: Volkov, I A, Kalabukhov, A S, Snigirev, O V, Zherikhin, A N
Format: Artikel
Sprache:eng
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Zusammenfassung:We have developed a fabrication process for submicron wide YBa sub(2)Cu sub(3)O sub(x) (YBCO) Josephson junctions on bicrystal substrates. The masks patterned in carbon films grown by laser ablation were used for ion beam etching of YBCO films. The carbon deposition parameters providing conservation of critical temperature of YBCO films covered by carbon layers have been found. The test 1.5 to 3 mu m wide YBCO bridges have been fabricated on single crystal SrTiO sub(3) substrates using the developed technology.
ISSN:1051-8223