Laser ablation rate of materials using the generated acoustic waves
It is shown that the acoustic waves generated during laser ablation can be used to determine the ablation threshold and the ablation rate for different fluences and depths and also to characterize the different regions of the process. On-line measurement of the individual ablation rate is possible b...
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Veröffentlicht in: | Journal of physics. D, Applied physics Applied physics, 1998-10, Vol.31 (19), p.2648-2652 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | It is shown that the acoustic waves generated during laser ablation can be used to determine the ablation threshold and the ablation rate for different fluences and depths and also to characterize the different regions of the process. On-line measurement of the individual ablation rate is possible by observation of the delay of the arrival of the acoustic wave to a piezoelectric detector located behind the sample. Material studied: PMMA. |
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ISSN: | 0022-3727 1361-6463 |
DOI: | 10.1088/0022-3727/31/19/039 |