Trends in sputtering

During the past century, there have been hundreds of manuscripts published reporting different aspects of sputtering. The purpose of this article is to summarize the trends observed when elemental and multicomponent materials are exposed to energetic ion beams. Attention is focused on low-energy (

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Bibliographische Detailangaben
Veröffentlicht in:	Progress in Surface Science 2000-05, Vol.64 (1), p.1-58
1. Verfasser:	Smentkowski, Vincent S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Angle of incidence Atomic, molecular, and ion beam impact and interactions with surfaces Beam current Beam energy Condensed matter: electronic structure, electrical, magnetic, and optical properties Differential sputtering Electron and ion emission by liquids and solids impact phenomena Elemental materials Exact sciences and technology Impact phenomena (including electron spectra and sputtering) Multicomponent materials Oxides Physics Sputtering Sputtering angle Sputtering geometry Sputtering rate Sputtering yield Surface enrichment
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Beschreibung
Zusammenfassung:	During the past century, there have been hundreds of manuscripts published reporting different aspects of sputtering. The purpose of this article is to summarize the trends observed when elemental and multicomponent materials are exposed to energetic ion beams. Attention is focused on low-energy (
ISSN:	0079-6816 1878-4240
DOI:	10.1016/S0079-6816(99)00021-0