Focused ion beams in microsystem fabrication

Focused ion beam (FIB) systems are widely used in microelectronics for prototype modification, device failure analysis and process monitoring. With the growing importance of micro-electro-mechanical systems (MEMS) the question arises whether FIB can be successfully and economically applied to protot...

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Bibliographische Detailangaben

Veröffentlicht in:	Microelectronic engineering 1997-02, Vol.35 (1-4), p.431-434
Hauptverfasser:	Daniel, J.H., Moore, D.F., Walker, J.F., Whitney, J.T.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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