Synthesis and characterization of porous polymeric low dielectric constant films

This paper reports the synthesis and dielectric properties of a porous poly(arylether) material with an ultra-low dielectric constant for interlayer dielectric applications in microelectronics. The porous polymer films were successfully fabricated by a method of organic phase separation and evaporat...

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Veröffentlicht in:	Journal of electronic materials 2001-04, Vol.30 (4), p.309-313
Hauptverfasser:	YUHUAN XU, ZHENG, D. W, TUNG, C. H, YIPIN TSAI, TU, K. N, ZHAO, B. I. N, LIU, Q.-Z, BRONGO, Maureen, ONG, Chung W. O, CHUNG LOONG CHOY, SHENG, George T. T
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Chemical synthesis Dielectric properties Electronics Exact sciences and technology Interfaces Interlayers Mechanical properties Microelectronic fabrication (materials and surfaces technology) Permittivity Phase separation Polymer films Polymers Pore size Porosity Porous materials Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Thermal expansion
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