Unusual High Hardness and Load-Dependent Mechanical Characteristics of Hydrogenated Carbon–Nitrogen Hybrid Films

Mechanical components are exposed to a rigorous environment in a number of applications including engineering, aerospace, and automobiles. Thus, their service lifetime and reliability are always on the verge of risk. Protective coatings with high hardness are required to enhance their service lifetime and minimize the replacement cost and waste burden. Hydrogenated amorphous carbon including nitrogen-incorporated films, that are commonly deposited by plasma-enhanced chemical vapor deposition, are widely used for commercial protective coating applications. However, their mechanical hardness still falls into the moderate hard regime. This needs to be substantially enhanced for advanced applications. Here, we report the synthesis of very hard nanostructured hydrogenated carbon–nitrogen hybrid (n-C:H:N) films. The optimized n-C:H:N film displays a hardness of about 36 GPa, elastic modulus of 360 GPa, and reasonably good elastic recovery (ER) of 62.7%. The mechanical properties of n-C:H:N films are further tailored when nitrogen pressure is tuned during the growth. The realized remarkably improved mechanical properties are correlated with the films’ structural properties and experimental growth conditions. We also conducted density functional theory calculations that show the trend for the elastic modulus of the amorphous carbon films with varying nitrogen concentrations matches well with experimentally measured values. Finally, we probed load-dependent mechanical properties of n-C:H:N films and found an anomalous behavior; some of the mechanical parameters, for instance, ER, reveal an irregular trend with indentation load, which we explain in the framework of the film–substrate composite concept. Overall, this work uncovers many unknown and exciting mechanical phenomena that could pave the way for new technological developments.