Oxidation mechanism involved in thin tin films
Tin in thin film form reaches its highest oxidation state SnO sub 2 either through direct or indirect phase transformation. The direct or indirect transformation depends on whether SnO is in the alpha or beta phase, respectively. When SnO sub 2 was reactively deposited, SnO sub 2 films formed throug...
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Veröffentlicht in: | Indian journal of engineering and materials sciences 1996-06, Vol.3 (3), p.109-113 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Tin in thin film form reaches its highest oxidation state SnO sub 2 either through direct or indirect phase transformation. The direct or indirect transformation depends on whether SnO is in the alpha or beta phase, respectively. When SnO sub 2 was reactively deposited, SnO sub 2 films formed through a direct transformation exhibited high conductivity and optical transmission than those formed through an indirect phase transformation. It has been observed that a direct transformation helps to reduce the substrate temperature required for the reactive deposition of SnO sub 2 . |
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ISSN: | 0971-4588 |