Low-temperature deposition of hexagonal ferrite films by sputtering

Pb-substituted Ba-ferrite films were prepared at various substrate temperature Ts by dc magnetron sputtering and their crystallographic characteristics and magnetic properties were investigated. The substitution of Pb facilitates the crystallization and improves the crystallinity for hexagonal M phase. All of the films prepared at Ts above 460 °C exhibit a good c-axis orientation and the c-axis dispersion angle (Δθ50) for Pb-substituted Ba-ferrite films is as small as 1°. The coercivities (Hc⊥) and Hc∥) and saturation magnetization Ms of Pb-substituted Ba-ferrite films are 0.7–1.0 kOe, 0.2 kOe and 250–300 emu/cm3, respectively.