Low temperature thinning of thick chemically vapor-deposited diamond films with a molten CeNi alloy
Thinning of chemically vapor-deposited diamond films has been achieved using molten rare earth alloys at substantially lower temperatures than those previously possible through the use of rare earth elements. A Ce-22%Ni eutectic alloy is shown to reduce the diamond etching temperature by more than 2...
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Veröffentlicht in: | Diamond and related materials 1994-02, Vol.3 (3), p.254-258 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Thinning of chemically vapor-deposited diamond films has been achieved using molten rare earth alloys at substantially lower temperatures than those previously possible through the use of rare earth elements. A Ce-22%Ni eutectic alloy is shown to reduce the diamond etching temperature by more than 200°C below the pure rare earth metal's melting temperature with no noticeable deterioration in thermal conductivity. The molten alloys provide fast reaction kinetics at practical temperatures (less than 600°C) for industrial application. A large number of diamonds may be processed simultaneously in this manner without compromising the material properties of the diamond. |
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ISSN: | 0925-9635 1879-0062 |
DOI: | 10.1016/0925-9635(94)90088-4 |