Low temperature thinning of thick chemically vapor-deposited diamond films with a molten CeNi alloy

Thinning of chemically vapor-deposited diamond films has been achieved using molten rare earth alloys at substantially lower temperatures than those previously possible through the use of rare earth elements. A Ce-22%Ni eutectic alloy is shown to reduce the diamond etching temperature by more than 2...

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Veröffentlicht in:Diamond and related materials 1994-02, Vol.3 (3), p.254-258
Hauptverfasser: McCormack, M., Jin, S., Graebner, J.E., Tiefel, T.H., Kammlott, G.W.
Format: Artikel
Sprache:eng
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Zusammenfassung:Thinning of chemically vapor-deposited diamond films has been achieved using molten rare earth alloys at substantially lower temperatures than those previously possible through the use of rare earth elements. A Ce-22%Ni eutectic alloy is shown to reduce the diamond etching temperature by more than 200°C below the pure rare earth metal's melting temperature with no noticeable deterioration in thermal conductivity. The molten alloys provide fast reaction kinetics at practical temperatures (less than 600°C) for industrial application. A large number of diamonds may be processed simultaneously in this manner without compromising the material properties of the diamond.
ISSN:0925-9635
1879-0062
DOI:10.1016/0925-9635(94)90088-4