Turn-on speed of grounded gate nMOS ESD protection transistors

The turn-on speed of nMOS transistors (nMOST) is of paramount importance for robust Charged Device Model (CDM) protection circuitry. In this paper the nMOST turn-on time has been measured for the first time in the sub-halve nanosecond range with a commercial e-beam tester. The method may be used to...

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Veröffentlicht in:Microelectronics and reliability 1996-11, Vol.36 (11-12), p.1735-1738
Hauptverfasser: Meneghesso, G., Luchies, J.R.M., Kuper, F.G., Mouthaan, A.J.
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Sprache:eng
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Zusammenfassung:The turn-on speed of nMOS transistors (nMOST) is of paramount importance for robust Charged Device Model (CDM) protection circuitry. In this paper the nMOST turn-on time has been measured for the first time in the sub-halve nanosecond range with a commercial e-beam tester. The method may be used to improve CDM-ESD hardness by investigating the CDM pulse responses within circuit. Furthermore it is shown that the CDM results of various protection layouts can be simulated with a SPICE model.
ISSN:0026-2714
1872-941X
DOI:10.1016/0026-2714(96)00186-2