Atomic Collision on Surfaces and Material Implementation
The thin film coatings grown by the PVD techniques of evaporation and sputtering are considered. Both are the most commonly used techniques, and they offer a large flexibility of material implementation. (Author)
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| Veröffentlicht in: | Materials science forum 1996-01, Vol.214, p.163-170 |
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| Sprache: | eng |
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| container_end_page | 170 |
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| container_issue | |
| container_start_page | 163 |
| container_title | Materials science forum |
| container_volume | 214 |
| creator | Nenadovic, T M |
| description | The thin film coatings grown by the PVD techniques of evaporation and sputtering are considered. Both are the most commonly used techniques, and they offer a large flexibility of material implementation. (Author) |
| doi_str_mv | 10.4028/www.scientific.net/MSF.214.163 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0255-5476 |
| ispartof | Materials science forum, 1996-01, Vol.214, p.163-170 |
| issn | 0255-5476 1662-9752 1662-9752 |
| language | eng |
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| source | Scientific.net Journals |
| title | Atomic Collision on Surfaces and Material Implementation |
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