Atomic Collision on Surfaces and Material Implementation

Atomic Collision on Surfaces and Material Implementation

The thin film coatings grown by the PVD techniques of evaporation and sputtering are considered. Both are the most commonly used techniques, and they offer a large flexibility of material implementation. (Author)

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Veröffentlicht in:Materials science forum 1996-01, Vol.214, p.163-170
1. Verfasser: Nenadovic, T M
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
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Zusammenfassung:The thin film coatings grown by the PVD techniques of evaporation and sputtering are considered. Both are the most commonly used techniques, and they offer a large flexibility of material implementation. (Author)
ISSN:0255-5476
1662-9752
1662-9752
DOI:10.4028/www.scientific.net/MSF.214.163