A complex design and microfabrication system for experimental production of planar waveguide lenses for integrated optical circuits

Planar waveguide lenses are key elements of optical integrated circuits (OIC) widely applied in signal processing, and in optical communication systems. The computative design program allows to optimize lens-shape for best focusing performances. Design can be carried out also for anisotropic waveguide materials e.g. LiNbO 3. Optimized lens-shape is encoded directly for electron-beam writing system based on a scanning electron microscope (JEOL 840 A) equipped with external lithographic beam control (ELPHY, Raith GmbH). By means of the system proton-exchanged lenses embedded in titanium-doped LiNbO 3 waveguides were developed. These lenses could have near diffraction limited focus spots in relatively field angles (> ±1°)..