Some properties of a microwave boosted glow discharge source using neon as the operating gas

The use of neon as the operating gas for the analysis of aluminium samples with the microwave boosted glow discharge source has been studied. A new type of anode tube allowed the gas to enter the source near the sample surface so that more material was transported into the discharge. Erosion rates h...

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Veröffentlicht in:Analytical and bioanalytical chemistry 1996-07, Vol.355 (7-8), p.873-875
Hauptverfasser: LEIS, F, STEERS, E. B. M
Format: Artikel
Sprache:eng
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Zusammenfassung:The use of neon as the operating gas for the analysis of aluminium samples with the microwave boosted glow discharge source has been studied. A new type of anode tube allowed the gas to enter the source near the sample surface so that more material was transported into the discharge. Erosion rates have been measured under conditions optimised for high line-to-background ratios and found to be lower than with argon (9 and 21 n/s, respectively). Despite the lower erosion rate the detection limits measured for a number of elements in aluminium are in the range 0.02-1 microg/g and comparable to those obtained with argon as the operating gas.
ISSN:0937-0633
1618-2642
1432-1130
1618-2650
DOI:10.1007/s0021663550873