Wet chemical etching of silicate glasses in hydrofluoric acid based solutions

Mechanism of the dissolution reaction is governed by the adsorption of the two reactive species: HF and HF sub 2 sup - and the catalytic action of H sup + ions, resulting in the breakage of the siloxane bonds in the silicate network. 126 refs.

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Veröffentlicht in:Journal of materials science 1993-12, Vol.28 (23), p.6261-6273
1. Verfasser: SPIERINGS, G. A. C. M
Format: Artikel
Sprache:eng
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Zusammenfassung:Mechanism of the dissolution reaction is governed by the adsorption of the two reactive species: HF and HF sub 2 sup - and the catalytic action of H sup + ions, resulting in the breakage of the siloxane bonds in the silicate network. 126 refs.
ISSN:0022-2461
1573-4803
DOI:10.1007/bf01352182