Atomic resolution with an atomic force microscope using piezoresistive detection

A new detection scheme for atomic force microscopy (AFM) is shown to yield atomic resolution images of conducting and nonconducting layered materials. This detection scheme uses a piezoresistive strain sensor embedded in the AFM cantilever. The cantilever is batch fabricated using standard silicon m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Applied physics letters 1993-02, Vol.62 (8), p.834-836
Hauptverfasser:	TORTONESE, M, BARRETT, R. C, QUATE, C. F
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!