Sb and Bi implanted SnO sub(2) thin films: Photoemission studies and application as gas sensors

Sb and Bi implanted SnO sub(2) thin films: Photoemission studies and application as gas sensors

Thin films of SnO sub(2) have been implanted with 90 keV super(121)Sb and super(209)Bi up to a dose of 3x10 super(16) ions/cm super(2). Sb causes a four orders of magnitude reduction in sheet resistance and introduces electrons into the Sn5s conduction band: these electrons can be seen directly in U...

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Veröffentlicht in:Applied surface science 1993-01, Vol.70-71 (1-4 pt A), p.359-362
Hauptverfasser: Dale, R S, Rastomjee, C S, Potter, F H, Egdell, R G, Tate, T J
Format: Artikel
Sprache:eng
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Zusammenfassung:Thin films of SnO sub(2) have been implanted with 90 keV super(121)Sb and super(209)Bi up to a dose of 3x10 super(16) ions/cm super(2). Sb causes a four orders of magnitude reduction in sheet resistance and introduces electrons into the Sn5s conduction band: these electrons can be seen directly in UV photoemission spectra. Bi is a less effective dopant but improves the selectivity of the films toward CO relative to CH sub(4) in gas-sensor applications.
ISSN:0169-4332