A microfabricated solid-state secondary Li battery

A thin-film solid-state Li/TiS 2 microbattery has been developed at Eveready Battery Company (EBC). It is fabricated using sputtering for deposition of the contacts, TiS 2 cathode, and glassy electrolyte. High vacuum evaporation is used to deposit a LiI layer and Li anode. The outstanding secondary performance with thousands of deep discharges, the capability of current density, as high as several mA/cm 2, and the long term stability both on-shelf and during cycling make the EBC Microbattery superior to any other microbattery reported to date.