Optical energy gap measurement of plasma chemical vapor deposition very thin films using evanescent wave
We propose the use of an evanescent field of waveguided light transmitted along a portion of an optical fiber with the cladding removed (a cladless optical fiber) to obtain the optical energy gap ( E o ) of a semiconductor. Through our study of this new method of measurement, it is clarified that E...
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Veröffentlicht in: | Japanese Journal of Applied Physics 1993-10, Vol.32 (10A), p.L1474-L1476 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | We propose the use of an evanescent field of waveguided light transmitted along a portion of an optical fiber with the cladding removed (a cladless optical fiber) to obtain the optical energy gap (
E
o
) of a semiconductor. Through our study of this new method of measurement, it is clarified that
E
o
of hydrogenated amorphous silicon (a-Si:H) semiconductor can be determined using a longer fabricated film which is thinner than ordinarily used. While ordinary methods of measurement require a film thickness on the order of 1 µm, this new method of measurement requires a film thickness on the order of 4 nm, with the cladless part of 50 mm in length. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/jjap.32.l1474 |