Quantitative texture analysis of thin polycrystalline layers

Understanding the physical properties of ultrathin layers (nanometre range) helps in manufacturing control. A quantitative x-ray diffraction investigation of preferred orientations in thin polycrystalline mono- and multilayers is presented. The Schulz reflection method and a parallel beam geometry at small incidence angles for pole figure measurement are used. Some monolayers of thickness 50-600 nm, e.g. nickel, titanium nitride, CeO sub 2 , and a four-layer system (MgF sub 2 /CeO sub 2 /Y sub 2 O sub 3 /Fe) prepared by vapour deposition, are analyzed. Quantitative determination of preferred orientations is carried out according to the component method by Helming and Eschner (Cryst. Res. Technol., 1990, 25, K203).