Laser machining of CVD diamond: chemical and structural alteration effects

Nd:YAG laser (1064 nm) and ArF laser (193 nm) surface machining of 400 μm thick, free-standing CVD diamond plates produced photon interaction zones which were chemically and structurally altered. A significant H loss and change in CC bonding environment were observed in the Nd:YAG laser-processed s...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Surface & coatings technology 1996-08, Vol.82 (3), p.320-325
1. Verfasser:	Fabis, Philip M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Alteration Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Diamond Exact sciences and technology Laser Materials science Physics Solid-fluid interfaces Surface treatments Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Nd:YAG laser (1064 nm) and ArF laser (193 nm) surface machining of 400 μm thick, free-standing CVD diamond plates produced photon interaction zones which were chemically and structurally altered. A significant H loss and change in CC bonding environment were observed in the Nd:YAG laser-processed specimens, while ArF laser processing exhibited less H depletion and structural alteration on a less extensive spatial scale. These results are related to the different interaction mechanisms of Nd:YAG and ArF laser photons with diamond.
ISSN:	0257-8972 1879-3347
DOI:	10.1016/0257-8972(95)02774-2