Electron energy dynamics in a RF discharge with trapezoidal driving voltage: comparison of experiment and particle-in-cell Monte Carlo collision simulation

Reports the properties of a special RF discharge characterized by a trapezoidal shape of the driving voltage pulse. This driving mode offers an advantage in comparison with the common sinusoidal voltage. It allows the separation in time of effects connected with the time derivative of the driving voltage-displacement current, \#a\-mechanism-from effects connected with the amplitude of the driving voltage-production of electrons at the electrodes, \#g\-mechanism. The energy gain and loss of electrons in this RF discharge have been studied in a collision-dominated helium discharge with special emphasis on the \#a\-mechanism. Experimental results from emission spectroscopy are compared and combined with a particle-in-cell Monte Carlo collision simulation. The electrons gain energy during the temporal change of the discharge voltage at high neutral particle pressure (400 Pa) and dissipate energy by inelastic collisions. (Abstract quotes from original text)