Effect of ion irradiation on the structure of Au/Ni multilayers
The effect of 340 keV Kr ion irradiation on the structure of polycrystalline sputtered Au/Ni superlattices was studied. Different structural modifications are observed depending on the irradiation dose range. An ion-induced relaxation of the compressive stresses initially present in the layers is ob...
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Veröffentlicht in: | Thin solid films 1996-04, Vol.275 (1-2), p.247-250 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The effect of 340 keV Kr ion irradiation on the structure of polycrystalline sputtered Au/Ni superlattices was studied. Different structural modifications are observed depending on the irradiation dose range. An ion-induced relaxation of the compressive stresses initially present in the layers is observed even after very small doses ( < "0.5mult10 exp -1 dpa). With an increasing dose, a progressive interdiffusion at the interfaces is clearly observed accompanied by a reduction of the structural disorder and by an improvement of the texture. Finally, at higher doses (8 dpa), a complete mixing is achieved leading to the formation of a metastable fcc polycrystalline solid solution exhibiting a strong (111) texture. Copyright (c) 1996 Elsevier Science S.A. All rights reserved. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(95)07054-0 |