Effect of ion irradiation on the structure of Au/Ni multilayers

The effect of 340 keV Kr ion irradiation on the structure of polycrystalline sputtered Au/Ni superlattices was studied. Different structural modifications are observed depending on the irradiation dose range. An ion-induced relaxation of the compressive stresses initially present in the layers is ob...

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Veröffentlicht in:Thin solid films 1996-04, Vol.275 (1-2), p.247-250
Hauptverfasser: TAMISIER, F, JAOUEN, C, GUERIN, P, GLADYSZEWSKI, G
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Sprache:eng
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Zusammenfassung:The effect of 340 keV Kr ion irradiation on the structure of polycrystalline sputtered Au/Ni superlattices was studied. Different structural modifications are observed depending on the irradiation dose range. An ion-induced relaxation of the compressive stresses initially present in the layers is observed even after very small doses ( < "0.5mult10 exp -1 dpa). With an increasing dose, a progressive interdiffusion at the interfaces is clearly observed accompanied by a reduction of the structural disorder and by an improvement of the texture. Finally, at higher doses (8 dpa), a complete mixing is achieved leading to the formation of a metastable fcc polycrystalline solid solution exhibiting a strong (111) texture. Copyright (c) 1996 Elsevier Science S.A. All rights reserved.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(95)07054-0