Formation of Complex Ceramic Miniaturized Structures by Pyrolysis of Poly(vinylsilazane)

Complex ceramic miniaturized structures that have much smaller dimensions and better precision than that which has been reported previously were prepared by a combination of X‐ray synchrotron lithography, casting, and pyrolysis processes. Poly(methyl methacrylate) and poly(tetrafluorethylene) miniaturized structures were prepared with high precision via a combination of X‐ray synchrotron lithography, electroplating, and molding (the German Lithographie, Galvanoformung, and Abformung (LIGA) process). Casting of a solution of a preceramic polymer, poly(vinylsilazane), in these miniaturized structures was performed for the first time, similar to the slurry‐casting technique of macroscopic bodies. Subsequent pyrolysis led to nearly perfect, complementary bodies of the original structures because of the high smoothness of the pyrolyzed ceramics. This was demonstrated by the complex spool and meander‐like miniaturized structures with internal dimensions