Mössbauer spectra and structures of Fe/Fe-N multilayered films formed by Fe sputtering and ECR nitrogen plasma exposure

Fe/Fe-N multilayered films were prepared by an alternation of Fe sputtering and Electron Cyclotron Resonance (ECR) nitrogen plasma exposure, and the films were investigated by 57Fe Conversion Electron Mössbauer Spectroscopy (CEMS). ECR nitrogen plasma exposure of the sputtered Fe layers generated fi...

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Veröffentlicht in:	Journal of magnetism and magnetic materials 1993-01, Vol.118 (3), p.352-358
Hauptverfasser:	Ono, Hideaki, Fujinaga, Masashi, Yonemoto, Takaharu, Miyagawa, Tsugio, Kitano, Yoko
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: electronic structure, electrical, magnetic, and optical properties Exact sciences and technology Magnetic properties and materials Magnetic properties of surface, thin films and multilayers Metals. Metallurgy Physics
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Zusammenfassung:	Fe/Fe-N multilayered films were prepared by an alternation of Fe sputtering and Electron Cyclotron Resonance (ECR) nitrogen plasma exposure, and the films were investigated by 57Fe Conversion Electron Mössbauer Spectroscopy (CEMS). ECR nitrogen plasma exposure of the sputtered Fe layers generated fine crystal ϵ-Fe2-3N and Fe2N grains, rather than thermally stable γ′-Fe4N. The Fe/Fe-N multilayered films has a periodic structure of [α-Fe]/[ϵ-Fe2-3N and Fe2N], and showed good soft magnetic properties.
ISSN:	0304-8853
DOI:	10.1016/0304-8853(93)90438-8