Binary optics: A VLSI-based microoptics technology

Binary optics technology applies VLSI and ULSI processing techniques to the field of microoptics to enable the fabrication of unique wavefront engineering devices from x-ray to IR wavelengths. The nested character of these stepped diffractive surface relief structures, coupled with submicron linewidths and precise etch depths, puts stringent demands on process tolerances. We summarize our efforts to produce high-optical-quality diffractive and refractive microoptics with this technology. We also describe novel techniques developed to fabricate the deep structures needed to form high-aspect-ratio gratings and analog refractive lenslet arrays, including thick resist processing and deep anisotropic etching.