“Laser cleaning” removes particles from surfaces

Laser-induced removal of particles from surfaces was demonstrated. Such “laser cleaning” can be performed on the bare contaminated surface or with additional micronthickness liquid film coverage on the surface. With the latter “steam laser cleaning” we achieved removal of epoxy, alumina, silicon, an...

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Bibliographische Detailangaben

Veröffentlicht in:	Microelectronic engineering 1993, Vol.20 (1), p.171-183
Hauptverfasser:	Zapka, W., Ziemlich, W., Leung, W.P., Tam, A.C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Explosive evaporation Laser cleaning Laser-induced particle removal Microcontamination Microdevices Particulate contamination
Online-Zugang:	Volltext
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