“Laser cleaning” removes particles from surfaces

“Laser cleaning” removes particles from surfaces

Laser-induced removal of particles from surfaces was demonstrated. Such “laser cleaning” can be performed on the bare contaminated surface or with additional micronthickness liquid film coverage on the surface. With the latter “steam laser cleaning” we achieved removal of epoxy, alumina, silicon, an...

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Veröffentlicht in:Microelectronic engineering 1993, Vol.20 (1), p.171-183
Hauptverfasser: Zapka, W., Ziemlich, W., Leung, W.P., Tam, A.C.
Format: Artikel
Sprache:eng
Schlagworte:
Explosive evaporation
Laser cleaning
Laser-induced particle removal
Microcontamination
Microdevices
Particulate contamination
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Zusammenfassung:Laser-induced removal of particles from surfaces was demonstrated. Such “laser cleaning” can be performed on the bare contaminated surface or with additional micronthickness liquid film coverage on the surface. With the latter “steam laser cleaning” we achieved removal of epoxy, alumina, silicon, and gold particles of size 0.1 μm to 10 μm from silicon surfaces. The proposed mechanism of particle ejection is described.
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(93)90214-P