Cements : a new medium for micro-engineering structures ?

In the past ten years there has been an upsurge in the mass production of complex microstructures that possess consistent reproduction of features down to a submicrometre precision. Such microstructures hold enormous potential for the important area of micro-engineering applications. This upsurge ha...

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Veröffentlicht in:Journal of materials science letters 1996-10, Vol.15 (19), p.1660-1663
Hauptverfasser: COLSTON, S. L, BARNES, P, FREIMUTH, H, LACHER, M, EHRFELD, W
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Sprache:eng
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Zusammenfassung:In the past ten years there has been an upsurge in the mass production of complex microstructures that possess consistent reproduction of features down to a submicrometre precision. Such microstructures hold enormous potential for the important area of micro-engineering applications. This upsurge has been brought about by advanced lithographic techniques with synchrotron radiation using mainly metal-, polymer- and ceramic-based materials. The first such use of cement in LIGA-microstructures is now reported. One fundamental difference of the approach here is that the forming chemical processes occur after the cement is poured into the micro-moulds rather than by fusion during pyrolysis. The wide variety of cements available, the lack of any need for high temperature sintering and the adhesive and strength qualities of cements in forming a composite are all reasons why cement microstructures should be examined more closely. 11 refs.
ISSN:0261-8028
1573-4811
DOI:10.1007/BF00636188