A heavy ion implanting facility at the Chiang Mai University

A heavy ion implanting facility at the Chiang Mai University

A proposed nitrogen ion implanter has a 0 deg and a 45 deg beam line. The 0 deg beam line has been installed and tested by using an RF source with an ion energy of approx140 keV. The N beam current is approx200 mu A at the target position. The beam can be magnetically swept to cover a 10x10 cm targe...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1993-08, Vol.89 (1-4), p.354-356
Hauptverfasser: Suwannakachorn, D, Boonyawan, D, Green, J P, Aumkaew, S, Thongleurm, C, Vichaisirimongkol, P, Vilaithong, T
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Sprache:eng
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Zusammenfassung:A proposed nitrogen ion implanter has a 0 deg and a 45 deg beam line. The 0 deg beam line has been installed and tested by using an RF source with an ion energy of approx140 keV. The N beam current is approx200 mu A at the target position. The beam can be magnetically swept to cover a 10x10 cm target area. Preliminary tests with an ion dose of approx10 exp 17 ions/cm exp 2 improved the hardness of stainless steel and aluminium samples. The 45 deg beam line and the analyzing magnet are under construction, after which the RF ion source will be replaced by a Danfysik 910 ion source which can be used for producing metal and heavier ions.
ISSN:0168-583X