Kinetic Energy Distributions of Sputtered Neutral Aluminum Clusters: Al--Al6

Neutral aluminum clusters sputtered from polycrystalline Al were analyzed by laser postionization time-of-flight (TOF) mass spectrometry. The kinetic energy distributions of Al through Al6 were measured by a time-of-flight technique. The interpretation of laser post-ionization TOF data to extract ve...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1993-07, Vol.82 (2), p.329-336
Hauptverfasser: Coon, S R, Calaway, W F, Pellin, M J, Curlee, G A, White, J M
Format: Artikel
Sprache:eng
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Zusammenfassung:Neutral aluminum clusters sputtered from polycrystalline Al were analyzed by laser postionization time-of-flight (TOF) mass spectrometry. The kinetic energy distributions of Al through Al6 were measured by a time-of-flight technique. The interpretation of laser post-ionization TOF data to extract velocity and energy distributions is presented. The Al cluster distributions are qualitatively similar to previous copper cluster distribution measurements from the laboratory. In contrast to the steep high energy tails predicted by the single- or multiple-collison models, the measured cluster distributions have high energy power law dependences in the range of E exp --3 to E exp --4.5 . Correlated collison models may explain the substantial abundance of energetic clusters that are observed in these experiments. The possible influences of cluster fragmentation on the distributions are discussed.
ISSN:0168-583X
DOI:10.1016/0168-583X(93)96036-C