Low temperature molecular beam epitaxial growth of ZnS/GaAs(001) by using elemental sulfur source
We report successful growth of ZnS on GaAs(001) using elemental sulfur and zinc sources. In order to use S, which has a very high vapor pressure for molecular beam epitaxy, a new type of effusion cell is developed. The cell is composed of the effuser and post-heating zones. Not only the control of v...
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Veröffentlicht in: | Journal of crystal growth 1993-02, Vol.127 (1), p.314-317 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We report successful growth of ZnS on GaAs(001) using elemental sulfur and zinc sources. In order to use S, which has a very high vapor pressure for molecular beam epitaxy, a new type of effusion cell is developed. The cell is composed of the effuser and post-heating zones. Not only the control of vapor pressure, but also bakeout of the MBE chamber could be achieved. ZnS/GaAs could be grown at temperatures as low as 150°C using S beam post-heated at 210°C and conventional Zn beam. Low temperature photoluminescence shows that high quality ZnS films are grown. |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/0022-0248(93)90628-A |