Temporal aspects of sputtering of TaC targets

The binary collision approximation program TRIM.SP is extended to include time dependence. This modified version is used to investigate time-dependent characteristics of cascades in TaC caused by 1 keV Ar projectiles. Energy and angular distributions of sputtered carbon and tantalum atoms for normal...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1995-08, Vol.102 (1), p.272-276
Hauptverfasser:	Vichev, R.G., Eckstein, W.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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