Temporal aspects of sputtering of TaC targets
The binary collision approximation program TRIM.SP is extended to include time dependence. This modified version is used to investigate time-dependent characteristics of cascades in TaC caused by 1 keV Ar projectiles. Energy and angular distributions of sputtered carbon and tantalum atoms for normal...
Gespeichert in:
| Veröffentlicht in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1995-08, Vol.102 (1), p.272-276 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The binary collision approximation program TRIM.SP is extended to include time dependence. This modified version is used to investigate time-dependent characteristics of cascades in TaC caused by 1 keV Ar projectiles. Energy and angular distributions of sputtered carbon and tantalum atoms for normal and oblique bombardment are studied. The dependence of these distributions due to input and model parameters is demonstrated and discussed. |
|---|---|
| ISSN: | 0168-583X 1872-9584 |
| DOI: | 10.1016/0168-583X(95)80153-D |