Far-IR spectroscopic ellipsometer

We have built a far-IR ellipsometer which combines the methods of Fourier transform IR (FTIR) spectroscopy and rotating analyser ellipsometry. The instrument is based on a Bruker FTIR spectrometer to which we attached an ellipsometer chamber. The spectral range is 30–600 cm−1. A variable-temperature...

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Veröffentlicht in:	Thin solid films 1993-10, Vol.234 (1-2), p.314-317
Hauptverfasser:	Barth, K.-L., Böhme, D., Kamaräs, K., Keilmann, F., Cardona, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Optical instruments, equipment and techniques Physics Polarimeters and ellipsometers
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	We have built a far-IR ellipsometer which combines the methods of Fourier transform IR (FTIR) spectroscopy and rotating analyser ellipsometry. The instrument is based on a Bruker FTIR spectrometer to which we attached an ellipsometer chamber. The spectral range is 30–600 cm−1. A variable-temperature cryostat enables us to make low temperature measurements down to 20 K. Initial results on the pseudodielectric function of Si:P and YBa2Cu3O7 are in good agreement with literature data.
ISSN:	0040-6090 1879-2731
DOI:	10.1016/0040-6090(93)90276-U