Films of molybdenum trioxide obtained from MoTe sub 2 -oriented films

Films of molybdenum trioxide obtained from MoTe sub 2 -oriented films

Layers of orthorhombic alpha -MoO sub 3 on a glass substrate were obtained from MoTe sub 2 films. Oriented MoTe sub 2 films were prepared by annealing under Te pressure of MoTe amorphous dc sputtered films then were thermally oxidized in O sub 2 at 723 K for 30 min. Stoichiometric films were obtaine...

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Veröffentlicht in:Thin solid films 1993-01, Vol.235 (1-2), p.25-29
Hauptverfasser: Bernede, J C, Alaoui, Z K, Manai, N
Format: Artikel
Sprache:eng
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Zusammenfassung:Layers of orthorhombic alpha -MoO sub 3 on a glass substrate were obtained from MoTe sub 2 films. Oriented MoTe sub 2 films were prepared by annealing under Te pressure of MoTe amorphous dc sputtered films then were thermally oxidized in O sub 2 at 723 K for 30 min. Stoichiometric films were obtained. Crystallites had preferred orientation with basal planes parallel to the substrate. 2-3% of Te was present in the films, increasing conductivity of the layers.
ISSN:0040-6090